What is the MEMS?

MEMSはMicro-Electro-Mechanical Systemsの略です. It is a technology that leverages semiconductor microfabrication processes to manufacture three-dimensional miniature devices on silicon wafers or other substrates, integrating both mechanical structures (such as cantilevers, diaphragms, gears, proof masses, and micromirrors) and electronic circuits on a single chip.

The core innovation of MEMS lies in its ability to integrate mechanical components and electronic processing circuits—traditionally implemented as separate discrete parts—onto a single chip at the micrometer scale. This enables devices to achieve miniaturization, light weight, high integration, 低消費電力, and low cost, while also delivering superior performance and reliability.

A typical MEMS device comprises three categories of functional units:

センサー: convert physical quantities from the external environment into electrical signals;

Actuators: convert electrical energy into mechanical motion to perform physical actions;

Electronic Circuits: amplify, calibrate, convert, and process the signals.

Today, MEMS technology is widely deployed in consumer electronics, automotive systems, 健康管理, industrial automation, 航空宇宙, and beyond. It is often regarded as the “bridge technology connecting the physical world with the information world.”