What is the MEMS?

MEMS steht für Micro-Electro-Mechanical Systems. It is a technology that leverages semiconductor microfabrication processes to manufacture three-dimensional miniature devices on silicon wafers or other substrates, integrating both mechanical structures (such as cantilevers, diaphragms, gears, proof masses, and micromirrors) and electronic circuits on a single chip.

The core innovation of MEMS lies in its ability to integrate mechanical components and electronic processing circuits—traditionally implemented as separate discrete parts—onto a single chip at the micrometer scale. This enables devices to achieve miniaturization, light weight, high integration, Energieeffizient, and low cost, while also delivering superior performance and reliability.

A typical MEMS device comprises three categories of functional units:

Sensoren: convert physical quantities from the external environment into electrical signals;

Actuators: convert electrical energy into mechanical motion to perform physical actions;

Electronic Circuits: amplify, calibrate, convert, and process the signals.

Today, MEMS technology is widely deployed in consumer electronics, automotive systems, Gesundheitspflege, industrial automation, Luft- und Raumfahrt, and beyond. It is often regarded as the “bridge technology connecting the physical world with the information world.”